What are the steps to use the vacuum coating machine？- Ningbo Danko Vacuum Technology Co., Ltd.

What are the steps to use the vacuum coating machine？

Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum, including many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion There are many kinds of beam sputtering. The main idea is divided into two kinds of evaporation and sputtering.

Electric control cabinet operation
1. Turn on the water pump and air source.
2. Turn on the main power supply.
3. Turn on the power supply of the maintenance pump and the vacuum gauge, the vacuum gauge position V1, wait for the value to be less than 10, and then enter the next step. It takes about 5 minutes.
4. Turn on the mechanical pump, pre-pump, turn on the power of the turbo molecular pump, and start it. The vacuum gauge switch is changed to the V2 position. It takes about 20 minutes to pump down to less than 2.
5. After observing that the reading of the turbomolecular pump reaches 250, turn off the pre-pump, turn on the backing pump and the high vacuum valve to continue vacuuming. After the vacuum reaches a certain level, turn on the high vacuum gauge on the right to observe the vacuum. Only after the vacuum reaches 2×10-3 can the electron gun power supply be turned on.

DEF-6B operation
1. Total power supply.
2. Turn on the electron gun control Ⅰ and electron gun control Ⅱ power supply at the same time: press the electron gun control Ⅰ power supply, delay switch, the delay, power supply and protection lights are on. After three minutes, the delay and protection lights are off. If the back door is not closed or the water flow relay has Failure, the protection light will always be on.
3. When the high voltage is turned on, the high voltage will reach more than 10KV, the beam current can be adjusted to about 200mA, the curtain grid is 20V/100mA, the filament current is 1.2A, and the deflection current swings between 1 and 1.7.

Shutdown sequence
1. Turn off the high vacuum meter and molecular pump.
2. When the molecular pump display reaches 50, turn off the high valve, the front stage, and the mechanical pump in turn. This period takes about 40 minutes.
3. When it is below 50, turn off the maintenance pump again.