Common vacuum leak detection methods

Leak detection by helium mass spectrometry

This technology is an indispensable technology in the field of vacuum leak detection. It is widely used in leak detection because of its high leak detection efficiency, easy operation, sensitive instrument response, high precision and not China PVD Coating Systems supplierseasily interfered by other gases. Helium mass spectrometer leak detector is a kind of gas tightness detection instrument based on mass spectrometry principle, which uses helium as leak indicator gas. It is composed of an ion source, an analyzer, a collector, a cold cathode ionization gauge, a mass spectrometry chamber, an exhaust system and an electrical part. Electrons emitted from the filament in the mass spectrometry chamber oscillate back and forth in the room and collide with the indoor gas and helium entering the room through the leaky hole to ionize into positive ions. These helium ions enter the magnetic field under the left and right brains of the accelerated electric field, and deflect due to the action of Lorentz force, forming a circular arc orbit and changing the accelerated electric field. Pressure enables ions of different mass to be detected by reaching the receiving pole through magnetic fields and receiving slots. Helium injection method and helium absorption method are the two commonly used methods in leak detection of helium mass spectrometer.